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0090-A9710 by Kollmorgen

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Series PD Servostar Servo Drives by Kollmorgen

Technical Specifications

Accelerating Voltage
150V-15000V
Energy Dispersion
X-ray spectrometry and EDX installed
Magnification
*200-*200000
Probe Current
10pA-1.2nA
Standard Resolution
4nm at 1kV
Vintage Year
2006
Wafer Size
12 inches

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